How does a cryopump work?

A cryopump is vacuum pump that traps gases and vapors by condensing them on a cold surface. According to this figure, if the cryocooled surface such as cryo-surface and cryopanel is cooled below 20K, the vapor pressure of the gas becomes below 10-8Pa, provided the vapor pressure is lower than that of nitrogen.

How does a helium compressor work?

Helium is mostly derived from natural gas, in which it is contained in low concentrations. Specially designed recovery systems store the helium in large balloons after its use in leak testing. A compressor siphons the helium and compresses it to 2900 psi. In this state it can easily be bottled and stored for later use.

How does a rough pump work?

The roughing pump is the component that primes the other pumps in series on the vacuum line, evacuating the system until a pressure level is reached at which a booster pump (known as a lobe-type roots pump) can be activated, followed by other types of diffusion, turbo molecular, cryogenic, ionic and other pumps that …

How does a turbomolecular pump work?

These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface. In a turbomolecular pump, a rapidly spinning fan rotor ‘hits’ gas molecules from the inlet of the pump towards the exhaust in order to create or maintain a vacuum.

What is cryopump regeneration?

Regeneration. Regeneration of a cryopump is the process of evaporating the trapped gases. Most production equipment utilizing a cryopump have a means to isolate the cryopump from the vacuum chamber so regeneration takes place without exposing the vacuum system to released gasses such as water vapor.

What is Cryo trapping?

Cryotrapping involves pumping air through a cooled loop, which usually contains an inert material such as glass beads to improve the trapping efficiency.

What is cryogenics used for?

Cryogenics is used in a variety of applications. It can be used to produce cryogenic fields for rockets, in MRI machines that use liquid helium and require cryogenic cooling, storing large quantities of food, special effects fog, recycling, freezing blood and tissue samples, and even cooling superconductors.

What is a roughing valve?

The roughing valve is used when evacuating a vacuum furnace chamber from atmospheric pressure to a so-called “rough” vacuum (typically in the range of 10-2 to 10-3 Torr). It is used when shutting down a vacuum furnace pumping system or for maintenance on the pumps or the furnace proper.

What two functions does a vacuum pump perform?

ABSTRACT. Industrial oil flooded screw vacuum pumps have two major functions: pulling down and maintaining the required vacuum level.

What is dry pump?

The definition of a dry vacuum pump is a pump that does not use any fluids to create a vacuum or contact the process gas and can also discharge to atmosphere. All dry vacuum rumps run hot, since there are no liquids to remove the heat created by compressing the gas.

What is mechanical pump?

In mechanical pumps, the gas present in a vacuum system is transferred from a low pressure to a higher pressure region. In order to be efficient, the pump has to provide simultaneously a finite pumping speed and compression. This category is known as: “Momentum transfer pumps”.

How do you regen a cryopump?

Regeneration Procedure